DC-AC Meas / DC-AC Electrical Measurements
Electrical measurements are used to measure electrical quantities like potential difference (voltage), electric charge and current, resistance, capacitance and inductance. They allow to relate the characteristics of devices (e.g., resistors, capacitors, inductors, diodes and transistors) and systems (e.g., MEMS, NEMS) to the intrinsic properties of materials and interfaces. Innovation-el offers access to a broad spectrum of electrical measurement tools, techniques and related analysis methods for the characterization of a wide range of materials (conductors, semiconductors and insulators), devices / test structures, circuits and systems.
These cover Current-Voltage (I-V) measurements with sub-μV and fA resolution, ultra-fast pulsed I-V measurements, Capacitance-Voltage (C-V) and Capacitance-frequency (C-f) measurements, DC and pulsed power measurements for high-voltage electronics and power semiconductors, Resistance measurements up to 1016Ω, Charge measurements from 10fC to 2 mC, etc. Automated stations and unique homemade setups are also available for VdP resistivity, AC/DC magnetometry, and Seebeck, Nernst, and Hall coefficient measurements at temperatures in the 1.8-320 K range.
Measurements of devices, circuits and systems can be performed by direct probing at the wafer level (probe station) using sharp needle-tipped probes. Testing of packaged devices is also supported. Home-built modular sample environments, equipped with custom-designed probes and digital measurement instruments are also available for use with samples in various forms (e.g. polycrystalline pellet, single crystal, films).
Wafer-level (at SUSS Micro-Tech probe-station at room temperature equipped with 4 probers and Janis Ltd. cryostat (−193O C to 200O C) probe station under vacuum conditions (∼10-2 mbar) equipped with 2 probers) and packaged device semiconductor characterization equipment for precision DC and pulsed electrical characterization with high power and LCR measurements capabilities
(1) Keithley 4200 SCS Semiconductor Parameter Analyser
Applications: DC and pulse device characterization, real-time plotting, and analysis with high precision and sub-fem to amp resolution
Specifications: (a) 2 I-V medium power Source Measure Unit (SMU) with ±210 V/1 A modules and 0.2 μV, 100 fA measure resolution, (b) Pulsed I-V Ultra-fast Pulse Measure Unit (PMU): ±40 V (80 V p-p), ±800 mA, 200 MSa/sec, 5 ns sampling rate, 20 ns programmable pulse width (c) 2 Remote Preamplifier/Switch Module (RPM) with automatically switches between I-V and pulsed I-V measurements
(2) Keithley 195 Digital Multimeter
Applications: DC Voltage drop, AC and DC current measurements and resistance evaluation
Specifications: (a) 100 nV to 1000 V voltage range, (b) 100 μOhm to 20 MOhm resistance range (c) 1 nA to 2 A AC current measurement range and 100 pA to 2 A DC current measurement range
(3) Keithley 617 Programmable Electrometer
Applications: Current / Voltage / Resistance / Charge measurements.
Specifications: (a) 2 pA to 20 mA, (b) 200 mV to 200 V, (c) Resistance measurements from 2 kOhm up to 200 GOhm, (d) Charge measurements from 200 pC to 20 nC, (e) Built-in ±0.1KV voltage source
(4) Keithley 230 Programmable Voltage Source
Applications: DC and pulse device characterization
Specifications: (a) 100 mV to 100 V voltage range, (b) ±2 mA, ±20 mA, ±100 mA programmable current limit, (c) minimum pulse width 10 ms and response time <3 ms
(5) Keithley 6220 Precision Current Source
Applications: Low DC current source
Specifications: (a) 2 nA to 100 mA current range, (b) 100 mV to 100 V voltage limit with 10 mV step, (c) settling time 100 μs
(6) Keithley 2182A Nanovoltometer
Applications: Low-noise voltage measurements
Specifications: (a) 10 mV to 10 V voltage range, (b) 1 nV to 1 μV resolution, (c) input resistance >10 GOhm
(7) Keithley 7001 Switch System
Applications: Two slots mainframe that supports DC and AC switching capabilities
Specifications: (a) 10 nV to 1000 V voltage switch range, (b) 10 fA to 1 5A voltage switch range, (c) 40 channels per slot
(8) 4284A Precision LCR Meter
Applications: Capacitance / Inductance measurements
Specifications: (a) 20Hz to 1MHz test frequency range, (b) 0.01 fF to 9.9 F capacitance range, (c) 0.01 nS to 99.9 S conductance range, (d) 0.01 nH to 99.9 kH inductance range, (e) 0 to 40 V DC bias range, (f) 0 to 1 V AC bias range
(9) HP 4140B Picoamperometer
Applications: DC electrical measurements
Specifications: (a) 0 to 100 V voltage range, (b) 1 pA to 10 mA current range, (c) 20 ms to 160 ms integration time (short), (d) two separate voltage sources
(10) HP 8116A Pulse Generator
Applications: AC electrical measurements
Specifications: 32Vpp voltage range, (b) 1 MHz to 50 MHz frequency range, (c) 10 ns to 999 ms pulse width, (d) 6 ns transitions (e) various pulse forms (Sine, triangle, square, and haverfunctions)
(11) TTi QL355P Power Supply
Applications: AC electrical measurements
Specifications: (a) 0 V to 35 V output voltage, (b) >3 A maximum current, (c) 112 W max power
Dr. Panagiotis Bousoulas (panbous@mail.ntua.gr)
Wafer-level (probe-station) and packaged device semiconductor characterization equipment for precision DC and pulsed electrical characterization with high power and LCR measurements capabilities.
(1) Keithley 4200 SCS Parameter Analyser
Applications: DC and pulse device characterization, real-time plotting, and analysis with high precision and sub-fem to amp resolution.
Specifications:
(a) DC source & measure 5 fA – 1 A, (b) DC source & measure 0.2 µV – 210 V, (c) Pulsed I-V Range: ±40 V (80 V p-p), ±800 mA, 200 MSa/sec, 5 ns sampling rate
(2) Keithley 2602A Dual-Channel System Source Meter
Applications: DC and pulse device characterization
Specifications:
(a) 3A DC to 10A Pulse, (b) Pulse width 100μs and longer
(3) Keithley 2651A High Power System Source-Meter instrument
Applications: DC and pulse high power characterization
Specifications:
(a) ± 100mV to ± 40V, (b) ± 100nA to ± 50A / 2KW
(4) Keithley 6517A Electrometer / High Resistance Meter
Applications: Current / Voltage / Resistance / Charge measurements
Specifications:
(a) 1fA to 20mA, (b) 10μV to 200V , (c) Resistance measurements up to 1016Ω, (d) Charge measurements from 10fC to 2 mC, (e) Built-in ±1KV voltage source.
(5) 4284A Precision LCR Meter
Applications: Capacitance / Inductance measurements
Specifications:
20Hz to 1MHz test frequency range
(6) Automated DC VpD resistivity-Hall measurement station
Applications: Hall measurements
Specifications:
(a) 20 GΩ-100TΩ input impedance configurations, (b) RT or 77K, (c) μmin = 1cm2/Vs
(7) M4C setup
Applications: Homemade setup with COTS system for AC and double AC modulated measurements (Hall, Seebeck, Nernst)
Specifications:
(a) 1mHz to 100 Hz, (b) sub-Johnson noise measurements capabilities, (c) Includes open cycle LHe or LN2 cryostat.
(8) MagLab-EXA 2000 setup
Applications: Multi-measurement system (Oxford Instruments) for automated materials characterisation (e.g. magneto-transport, Hall effect, AC/DC magnetometry etc) by using different probes and samples in diverse morphologies, ranging from films to (nano)crystals.
Specifications:
(a) High magnetic field (H= 0-7 Tesla), (b) Low-temperature LHe cryostat (T= 1.8-320 K), (c) DC resistivity in a standard 4-wire configuration (10 μΩ - 10 MΩ), (d) DC moment extraction (~10-4 emu), (e) AC susceptibility (~10-6 emu), f= 0.01-10 kHz.
(9) Custom-made Magneto-electric workstation
Applications: Programmable physical property measurements (e.g. magneto-transport, Seebeck coefficient, magneto-dielectric response, pyro-electric current etc), with a home-built modular sample environment, equipped with custom-designed probes, and digital measurement instruments for use with samples in various forms (e.g. polycrystalline pellet, single crystal, films).
Specifications:
(a) High magnetic field (H= 0-7 Tesla), (b) Continuous flow cryostat (T= 1.8-320 K)
(c) Low noise voltage (down to 50 nV) and resistance measurements, 4-probe: Keithley 6221 DC & AC Current Source or 2400 SourceMeter / Keithley 2182A Nanovoltometer
(d) High resistance (> 1 GΩ), low current (~1 fA) and charge (~fC to μC), 2-probe: Keithely 6517B & 6517A
(e) Dielectric permittivity: 20 Hz to 2 MHz, DC-bias ±40 V (LCR Meter Agilent E4980A) / 50 Hz-20 kHz (capacitance bridge AH 2700)
For (1) to (5): Ms Maria Kayambaki, mmic@physics.uoc.gr
For (6) & (7): Prof Eleftherios Iliopoulos, iliopoul@physics.uoc.gr
For (8) & (9): Dr. Alexandros Lappas, lappas@iesl.forth.gr
