EP / Electroplating

Electroplating consists in the electrolytic deposition of metals onto a conductive or semi-conductive surface. The latter surface referred to as the cathode (negatively biased electrode) is immersed in an electrolyte solution containing the metal ions to be plated. The metal ions come from metal salts added to the solution, and from the anodic dissolution of sacrificial anodes (positively biased electrode), made of the same metal to be deposited on the cathode. An electric field applied between the two electrodes forces the positively charged metal ions to move to the cathode where they are reduced and deposited. The growth velocity and structural properties of the plated metal layer depend on parameters like the bath temperature and pH, the current density, the plating time, anode surface morphology, etc.

Innovation.el provides access to electroplating equipment for the deposition of Au, Ni & Cu layers with thickness in the range of 0.5 to 10μm. Such deposits are particularly suitable for applications in MEMS processing and semiconductor technologies.

Tool

Electroplating system / nb-technologies

Plated metals

Au, Cu, Ni

Wafer size

Up to 3 inch

Solutions

NB SEMIPLATE AU 100, NB SEMIPLATE CU 100, NB SEMIPLATE NI 100

Bath temperature

Up to 60oC

Current density

Au: 1 to 10mA/cm², Cu: 10 to 40 mA/cm², Ni: 10 to 30mA/cm²

Attainable thickness

From 0.5 to 10μm

Additional Information

Mr. George Stavrinidis (gstav@physics.uoc.gr) & Mr. Antonis Stavrinidis (astav@physics.uoc.gr)

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provided at Innovation-el by:
IESL/FORTH Heraklion