Profilometry / Surface Stylus Profilometry

Using a stylus profilometer instrument a process engineer can perform a surface texture analysis. This way the user is able to measure the surface topography of a wafer or sample by revealing a surface topographical image. In order to perform surface scanning of a sample, the tool is equipped with a stylus. The stylus moves vertically and laterally across the surface. Vertical displacement measurement graph as a function of position is acquired during the profilometry measurement in real time as well as a final output file. The vertical measuring range varies from 10 nm up to 1 mm.