Profilometry / Surface Stylus Profilometry
Using a stylus profilometer instrument a process engineer can perform a surface texture analysis. This way the user is able to measure the surface topography of a wafer or sample by revealing a surface topographical image. In order to perform surface scanning of a sample, the tool is equipped with a stylus. The stylus moves vertically and laterally across the surface. Vertical displacement measurement graph as a function of position is acquired during the profilometry measurement in real time as well as a final output file. The vertical measuring range varies from 10 nm up to 1 mm.


Veeco Dektak 150
Vertical topography profilometry measurement
Contact stylus profilometry
Two-dimensional surface profile measurements
Low-Inertia Sensor (LIS 3)
1 to 10mg
Manual X/Y/, 100 x 100mm X-Y translation, 360° rotation, manual leveling; optional X-Y auto stage, 150mm travel, 1µm repeatability; optional 200mm wafer vacuum chuck; optional 6-inch square porous vacuum chuck
Dektak software running under Windows® XP
Step Detection software
Stress Measurement software
55mm standard
Up to 90mm
150mm
524um
Contact point: Mr. Antonis Stavrinidis (astav@physics.uoc.gr)