TEM /Transmission Electron Microscopy

EM and Scanning TEM (STEM) utilizes a high-energy electron beam that is transmitted through a very thin sample. In TEM, the beam is stationary while in STEM, a fine focused electron beam is scanned across the sample. The transmitted electrons are used to form images of the sample allowing morphology’s studies at the nanoscale. For crystalline samples, diffraction phenomena are exploited to obtain information about the sample’s crystallography. High-Resolution TEM & STEM (HRTEM & HRSTEM) provide images with atomic resolution (0.1-0.2 nm). These techniques are used to provide information about the arrangement of atoms on interfaces, surfaces and crystalline defects. Elemental analysis can be performed by Energy Dispersive X-ray (EDX) spectroscopy through analysis of the X-rays emitted by the sample. In addition, using Electron Energy Loss Spectroscopy & Energy Filtered TEM (EELS & EFTEM) chemical analysis and mapping can be extended to light atoms (down to Li) while chemical bonding and valency of atoms can be studied.

The facility includes 6 microscopes ranging from conventional TEM to HRTEM (0.19nm resolution) and HRSTEM (0.14nm resolution) including analytical TEM incorporating EDS and EELS/EFTEM.

Tool

Thermo Fisher Scientific Talos F200i TEM

Applications

Conventional & High Resolution Scanning / Transmission Electron Microscopy, Energy Dispersive X-ray Spectroscopy (EDX)

Source

Field Emission Gun

Beam Voltage

200kV

Detection

16 Mpixel CETA CMOS camera
4kx4k STEM imaging
Triple Thermo-Fisher 3 detectors system bright field (BF), annular dark field (DF1,DF2)
Fischione 3000 high angle annular dark field detector (HAADF)
EDX Bruker 6|T Flash 100 mm2 (light elements sensitivity down to Be)

Resolution

TEM point resolution: 0.25nm
TEM information limit: 0.12nm
STEM resolution: 0.16nm

Positioning

x,y movement: α tilt = ± 35o, β tilt = ± 30o

Other Capabilities

4 available S/TEM detectors: HAADF, DF4, DF2, BF
max solid angle for EDX: 1.3srad

Additional Information

Dr. Nikos Boukos, n.boukos@inn.demokritos.gr

Tool

FEI CM20 TEM

Applications

Conventional & High Resolution Transmission Electron Microscopy, Electron Energy Loss Spectroscopy (EELS) and Energy Dispersive X-ray Spectroscopy (EDX) analysis

Source

Thermionic gun LaB6

Beam Voltage

200kV

Detection

1M pixel CCD camera with GIF
EDAX EDX system (light elements sensitivity down to B)
GATAN GIF200 imaging filter

Resolution

TEM point resolution: 0.27nm
TEM information limit: 0.18nm

Positioning

x,y movement: α tilt = ± 45o, β tilt = ± 30o

Other Capabilities

Energy Filtered TEM

Additional Information

Dr. Nikos Boukos, n.boukos@inn.demokritos.gr

Tool

Jeol JEM-F200 Multi-purpose UHR TEM/STEM

Applications

High-Resolution Scanning/Transmission Electron Microscopy (HRTEM/HRSTEM),  Energy Dispersive X-ray (EDX) Spectroscopy

Source

Cold Field Emission Gun

Beam voltage

200 kV

Detection

9Mp CMOS GATAN Bottom camera
4Mp JEOL side camera
In Stem mode: High Angle Annular Dark Field ( HAADF Z-contrast imaging), Annular Bright Field (ABF) and Annular Dark Field (ADF) imaging
EDX detector T-max 65 Oxford Instruments for Nanoanaysis & Chemical mapping

Resolution

HRTEM point-to-point 0.19 nm
HRSTEM point-to-point 0.14 nm

Positioning

x,y movement: α tilt = ± 25o, β tilt = ± 25o, high tilt retainer ± 65o

Other capabilities
Additional Information

Professor Thomas Kehagias (kehagias@auth.gr)
Professor Philomela Komninou, Director (komnhnoy@auth.gr )

Tool

Jeol JEM 2000FX HR TEM

Applications

Conventional & High-Resolution Transmission Electron Microscopy

Source

Thermionic gun LaB6

Beam Voltage

200 kV

Detection

1.4 Mpixel CCD camera KeenView G2 - Olympus

Resolution

0.28 nm

Positioning

x,y movement: α tilt = ± 30o, β tilt = ± 30o

Other Capabilities
Additional Information

Professor Thomas Kehagias, kehagias@auth.gr
Professor Philomela Komninou, komnhnoy@auth.gr

Tool

Jeol JEM 1010 TEM

Applications

Conventional Transmission Electron Microscopy

Source

Thermionic gun W

Beam Voltage

100 kV

Detection

GATAN Compact TV camera – Model 696

Resolution

0.40 nm

Positioning

x,y movement: α tilt = ± 45o, β tilt = ± 45o

Other Capabilities
Additional Information

Professor Thomas Kehagias, kehagias@auth.gr
Professor Philomela Komninou, komnhnoy@auth.gr

Tool

Jeol JEM 2011 UHR TEM

Applications

Conventional & High-Resolution Transmission Electron Microscopy, Energy Dispersive X-ray (EDX) Spectroscopy

Source

Thermionic gun LaB6

Beam Voltage

200 kV

Detection

20 Mpixel CMOS camera XAROSA EmSis - Olympus
EDX detector T-max 65 Oxford Instruments

Resolution

0.19 nm

Positioning

x,y movement: α tilt = ± 12o, β tilt = ± 12o

Other Capabilities
Additional Information

Professor Thomas Kehagias, kehagias@auth.gr
Professor Philomela Komninou, komnhnoy@auth.gr

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